Semiconductor Device and Process Simulation

Lecture Notes on

EEE533: Semiconductor Device and Process Simulation

These PowerPoint lecture notes have been prepared by Dragica Vasileska during the course of teaching the EEE533 Class atArizona State University for several semesters.

Class Syllabys

Here are the subject topics that have been covered during the course of teaching this class:

· Introductory Concepts

· Introduction to Modeling

· Review of Semiconductor Statistics

· Drift and Diffusion Processes

· Generation Recombination Mechanisms

· Mobility Models used in SILVACO

· Introduction to Numerics: Part1, Part2, Part3, Part4

· Getting Started Using SILVACO

· ATLAS Syntax: Part1, Part2, Part3

· ATLAS Extract Statements Description

· Diode Example

· Energy Balance Model

· Theoretical Description

· ATLAS Syntax

· Silvaco Example: Isothermal vs. Non-Isothermal Model

· Gate Current Models, Impact Ionization, EEPROM and SOI Modeling

· Gate Current Models

· Impact Ionization Models

· Device Reliability Modeling

· EEPROM Devices

· SOI Devices: PD vs. FD Devices

· Quantum-Mechanical Models

· Review from EEE531: Non-Idealities in MOS Capacitors

· Quantum-Mechanical Models

· Devices Used in RF Applications

· Review of BJT from EEE531

· Two-Port Network Description

· Introduction to S-Parameters

· Esaki Diodes & Transferred Electron Devices

· BLAZE: HEMT

· BLAZE: HBT

· Process Simulation

· SILVACO Athena Description: Part1, Part2, Part3

· Process Flow for the Fabrication of 0.1um MOSFET Device

· Other SILVACO Athena Examples